MPO 100 是一种双光子聚合 (TPP) 多用途工具，用于微结构的 3D 光刻和 3D 微打印，应用于光学、光子学、力学和生物医学工程。 3D 模块打印平台- MPO 100 提供 3D 高精度光刻以及 3D 微打印的高产量，并能够在单个工艺步骤中以高吞吐量生产复杂的微结构。
MPO 100 拥有一个强大的飞秒雷射波长为522nm，能够高效、高速的处理许多商用的聚合物材料，其中包括获得业界验证的一种无机-有机杂化聚合物，称为ORMOCER®，这类材料具有独特的光学、机械和化学特性。此外，MPO 100也在尝试各种光刻胶运用在522 nm TPP波长，都表现出高灵敏度，因此MPO 100是研发新材料系统中的理想工具
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特定的写入模块可在 3D 光刻和 3D 微打印之间快速轻松地切换，可以制造高度超过1厘米的宏观结构以及表面质量优良、粗糙度低至10nm的微观结构；可实现的最小特征尺寸低至 100 nm，可达成的扫描速度超过1000 mm/s，为定制的3D纳米、微米和宏观结构制造工艺让用户能够充分的利用各项工艺。
The MPO 100 is a Two-Photon Polymerization (TPP) Multi-User Tool for 3D Lithography and 3D Microprinting of microstructures with applications in Optics, Photonics, Mechanics and Biomedical Engineering. The modular 3D printing platform MPO 100 offers high precision on demand for 3D Lithography as well as high print volume for 3D Microprinting and enables production of complex functional microstructures with high throughput in a single process step.
The MPO 100 includes a powerful femtosecond laser system operating at a wavelength of 522 nm thereby enabling efficient and high-speed processing of many commercially available polymer systems. Among those is the industry-proven class of inorganic-organic hybrid polymers known as ORMOCER®. This class of materials provides unique optical, mechanical and chemical properties. In addition, as many photoresists exhibit high sensitivity at the 522 nm TPP wavelength the MPO 100 is an ideal tool for R&D to develop new material systems.
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Application-specific write modes enable fast and easy switching between 3D Lithography and 3D Microprinting. Macro structures with a height of over 1 cm can be fabricated as well as micro structures with superior surface quality exhibiting a roughness of down to 10nm. The achievable minimum feature size of down to 100 nm and the accessible scan speed of over 1000mm/s provide full user benefit for tailored 3D nano-, micro- and macro fabrication processes.
